Thin films of SDC for SOFC electrolyte were prepared using electron beam deposition technique. The influence of annealing temperature, substrate temperature and e-beam gun power on the structure and surface morphology of the thin films was examined. It was found that the SDC thin films annealed at 800 degrees C consisted of a single cubic phase and the main crystal structure of the thin films represented those of evaporated electrolyte powders. The crystal orientation of the SDC films increased with substrate temperature and decreased with e-beam gun power. The higher XRD peak intensity was observed for the SDC films deposited on NiO-YSZ substrate compared with those on SiO2 substrate due to the polycrystalline structure of the NiO-YSZ substrate. A good adhesion to the substrate and a columnar structure were observed by the fractured cross-sectional view of the SDC films on NiO-YSZ anode substrate. Electrical conductivity of SDC film with 5 microm thickness was observed to be 2.31 x 10(-3) Sm(-1) at 800 degrees C.